Our ALE/1C UV-LED Light Engine delivers broadband (i-line, CWL 365 nm / h-line, CWL 405 nm / g-line, CWL 436 nm) output to match conventional 1-to-2 kW mercury arc lamps’ illumination power.
These UV-LED light sources feature a low-footprint exposure unit combined with a separate control subsystem that readily integrates into your equipment. Our ALE/1C UV-LED Exposure Systems replace mercury discharge lamps in many semiconductor photolithography tools.